Self-sensing and self-actuating valve for modulating process coolant flow

ABSTRACT

A valve includes a first inline compartment to attach to a first return line exiting a processing chamber and a second inline compartment to attach to a second return line entering a coolant source. A flow compartment is attached between the first inline compartment and the second inline compartment and through which a coolant is to return to the coolant source. A first inlet orifice and a second inlet orifice positioned between the first inline compartment and the flow compartment. A plunger has a tip to variably open and close the second inlet orifice. A shape memory alloy (SMA) spring is positioned on the plunger and attached to the tip, the SMA spring to variably increase or decrease a flow rate of the coolant through the second inlet orifice according to a temperature of the coolant.

TECHNICAL FIELD

Some embodiments of the present disclosure relate, in general, to aself-sensing and self-actuating valve for modulating process coolantflow.

BACKGROUND

Process coolant can be circulated throughout a processing chamber (amongother processing equipment) of a process tool in order to reduce heatexpenditure of various processing components that generate temperaturesupwards of multiple hundreds of degrees Celsius. Modulating processcoolant through coolant lines of the processing tool providesopportunities to reduce the energy footprint of process tools thatperform semiconductor device manufacturing. Using servo-controlledvalves is one solution that, while functioning, comes with theadditional costs and complexities of sensors, control logic, andactuators. Furthermore, servo-controlled valves also come with theoverhead of tuning control parameters for a given process tool setup,and which can be time-consuming and thus expensive.

SUMMARY

Some embodiments described herein cover a cooling system for cooling aprocess tool. For example, a cooling system according to one embodimentincludes a coolant source to provide a coolant that cools down heatedcomponents of a processing chamber and a return line for the coolantcoupled between the processing chamber and the coolant source. Thereturn line has a valve, which includes a flow compartment having afirst inlet and an outlet that support a default flow rate of thecoolant, the flow compartment also having a second inlet. The valvefurther includes a first compartment that is inline with the return lineand that is to feed the coolant through the first inlet and the secondinlet. The valve further includes a plunger having a tip at a distal endof the plunger, the tip to variably open and close the second inlet tovary a flow rate of the coolant from the default flow rate. The valvefurther includes a bias spring positioned on a proximal end of theplunger. The valve further includes a shape memory alloy (SMA) springpositioned on the plunger between the bias spring and the tip, the SMAspring attached to the tip to variably withdraw the tip from the secondinlet in response to a rise in temperature of the coolant above athreshold temperature value.

In some embodiments, a valve of the cooling system includes a flowcompartment having a first inlet and an outlet that support a defaultflow rate of a coolant from a return line between a processing chamberand a coolant source, the flow compartment also having a second inlet.The valve further includes a first compartment that is inline with thereturn line and that is to feed the coolant through the first inlet andthe second inlet. The valve further includes a plunger having a tip at adistal end of the plunger, the tip to variably open and close the secondinlet to vary a flow rate of the coolant from the default flow rate. Thevalve further includes a bias spring positioned on a proximal end of theplunger. The valve further includes a shape memory alloy (SMA) springpositioned on the plunger between the bias spring and the tip, the SMAspring attached to the tip to variably withdraw the tip from the secondinlet in response to a rise in temperature of the coolant above athreshold temperature value.

In some embodiments, a valve of the cooling system includes a firstinline compartment to attach to a first return line exiting a processingchamber. The valve further includes a second inline compartment toattach to a second return line entering a coolant source. The valvefurther includes a flow compartment attached between the first inlinecompartment and the second inline compartment and through which acoolant is to return to the coolant source. The valve further includes afirst inlet orifice and a second inlet orifice positioned between thefirst inline compartment and the flow compartment. The valve furtherincludes a plunger having a tip to variably open and close the secondinlet orifice. The valve further includes a shape memory alloy (SMA)spring positioned on the plunger and attached to the tip, the SMA springto variably increase or decrease a flow rate of the coolant through thesecond inlet orifice according to a temperature of the coolant.

BRIEF DESCRIPTION OF THE DRAWINGS

The present disclosure is illustrated by way of example, and not by wayof limitation, in the figures of the accompanying drawings in which likereferences indicate similar elements. It should be noted that differentreferences to “an” or “one” embodiment in this disclosure are notnecessarily to the same embodiment, and such references mean at leastone, but can make reference to multiple embodiments.

FIG. 1 is a schematic block diagram of an example processing systemaccording to an embodiment.

FIG. 2A is a cross-section view of an example valve that controlscoolant flow between a processing chamber and a coolant source while thecoolant temperature is below a threshold temperature value according toan embodiment.

FIG. 2B is a cross-section view of the example valve of FIG. 2A whilethe coolant temperature is above the threshold temperature valueaccording to an embodiment.

FIG. 3 is a graph of an example transition zone between a low flow rateand a high flow rate of the valve of FIGS. 2A-2B according to anembodiment.

FIG. 4 is a schematic block diagram of a thermal model for the valve ofFIGS. 2A-2B according to some embodiments.

FIG. 5 is a cross-section view of an example dual-valve that controlscoolant flow between a processing chamber and a coolant source while thecoolant temperature is below a threshold temperature value according toan embodiment.

FIG. 6 is a graph of an example first transition zone between a low flowrate and a medium flow rate, and a second transition zone between themedium flow rate, and a high flow rate of the dual-valve of FIG. 5 .

DETAILED DESCRIPTION OF EMBODIMENTS

Embodiments of the present disclosure provide a self-sensing andself-actuating valve for modulating process coolant flow, which resolvesthe above-mentioned deficiencies in current servo-controlled solutions.Further, the modulation of process coolant flow can seek to retain aconstant flow rate of the coolant through coolant lines in a way thatconserves heat energy throughout the processing system (or tool) andreacts to increases in coolant temperature. In some embodiments, a valvecan be placed inline on a return line of the coolant system between theprocessing chamber (or other processing equipment) and a coolant sourcesuch as a coolant reservoir or the like. The valve can be adapted tomechanically limit or increase flow of the coolant through the returnline based on a temperature of the coolant.

In one embodiment, the valve employs a multi-compartment approach inwhich in-line compartments receive coolant from the processing chamberand return the coolant to the coolant source while a flow compartment,which is attached between the in-line compartments, allows the coolantto freely flow through the valve. Flow through a second of two orificesbetween a first inline compartment (at an input of the valve) and theflow compartment can be variably controlled with use of a shape memoryalloy (SMA) spring-enabled plunger having a tip that is capable ofcompletely blocking the second orifice. The tip can be cone-shaped(e.g., conical) in one embodiment, e.g., to enable variable levels ofblocking the second orifice.

More specifically, the valve can include a first inline compartment toattach to a first return line exiting a processing chamber. The valvefurther can include a second inline compartment to attach to a secondreturn line entering a coolant source. The flow compartment can beattached between the first inline compartment and the second inlinecompartment through which a coolant is to return to the coolant source.The valve can further include a first inlet orifice and a second inletorifice positioned between the first inline compartment and the flowcompartment. The valve can further include a plunger having a tip tovariably open and close the second inlet orifice to variably control thecoolant flow through the valve. The valve can further include an SMAspring positioned on the plunger and attached to the tip. The SMA springcan variably increase or decrease a flow rate of the coolant through thesecond inlet orifice according to a temperature of the coolant.

Advantages of embodiments of the present disclosure include, but are notlimited to, mechanically-employed sensing and rate modulation capability(via the SMA-enabled plunger in the valve) that obviates the need for anexternal sensor, control logic, or an actuator, to include the need foroverhead required to tune control parameters of such a servo-controlledsolution. Further, the disclosed valve has no need of an external energysource, in using the heat energy of the exiting coolant itself. Further,the valve can be adapted to function in both continuous flow rateadjustments or in predetermined step adjustments that are based on thetemperature of the coolant. The disclosed valve is thus cost efficientin reducing complexity and eliminating reliance on external energysources. Further, the valve can be adapted to work with various coolantstypes and in highly corrosive environments. These and other advantageswill be mentioned in the below disclosure and/or will be apparent tothose of ordinary skill in the art of semiconductor device processing.

FIG. 1 is a schematic block diagram of an example processing system 100according to an embodiment. The processing system 100 (or processingtool) can include a processing chamber 102, which is representative ofprocessing equipment to be cooled, a coolant source 120 that suppliescoolant to the processing chamber 102 (e.g., within coolant lines), anda valve 110 positioned on a return line 105 coupled between theprocessing chamber 102 and the coolant source 120. The return line 105can include a first return line 105A attached between the coolant linesof the processing chamber 102 and the valve 110 and a second return line105B attached between the valve 110 and the coolant source 120. Thevalve 110 can be adapted to mechanically limit or increase flow of thecoolant through the return line based on a temperature of the coolant.

As mentioned, the coolant source 120 can be a reservoir, container, orthe like into which a coolant is supplied from a facility fluid inletand to which coolant can be recycled via a facility fluid outlet. Thecoolant can be, but need not be, a water-based coolant. In oneembodiment, the coolant is a fluid mixture that includes Ununtrium(UUT). For example, the Ununtrium can be mixed with water and/or otherfluids. In other embodiments, the coolant is gas-based, to include anair mixture.

FIG. 2A is a side view of an example valve 210 that controls coolantflow between a processing chamber and a coolant source while the coolanttemperature is below a threshold temperature value according to anembodiment. In this embodiment, the valve 210 can be the same as thevalve 110 of FIG. 1 . In various embodiments, the valve 210 includes afirst compartment 204 (e.g., first inline compartment), a secondcompartment 208 (e.g., second inline compartment), and a flowcompartment 206 attached between the first compartment 204 and thesecond compartment 208.

The flow compartment 206 can have a first inlet 203 (e.g., first inletorifice) and an outlet 207 (e.g., outlet orifice) that support a defaultflow rate of the coolant indicated by single arrows, e.g., a defaultflow rate of coolant from the first compartment 204 to the second com(GPM) or other acceptably low flow rate. In one embodiment, the low flowrate is 3.7 GPM. The flow compartment 206 can further include a secondinlet 205 (e.g., second inlet orifice best seen in FIG. 2B) forproviding variably additional flow of the coolant through the valve 210.

In various embodiments, the first compartment 204 is inline with thefirst return line 105A and feeds the coolant through the first inlet 203and the second inlet 205 into the flow compartment 206. In theseembodiments, the second compartment 208 is inline with the second returnline 105B and also includes the outlet 207. A partition 211 of thesecond compartment can block flow between the first compartment 204 andthe second compartment 208.

In various embodiments, the valve 210 further includes a valve assemblythat includes a plunger 212, a bias spring 230, a backstop 220, and anSMA spring 240. The plunger 212 can include or be attached to a flange216 and a tip 224. In these embodiments, the tip 224 is positioned at adistal end of the plunger 212 and is to variably open and close thesecond inlet 205 to vary a flow rate of the coolant from the defaultflow rate. In some embodiments, the plunger is adapted to moveorthogonally to a flow of the coolant through the flow compartment 206.In one embodiment, the tip 224 is cone-shaped, e.g., is a cone-shapedtip. In other embodiments, the tip 224 is another geometrical shape(e.g., spherical, block-shaped using a corner) that can block the secondinlet 205 and variably allow more coolant flow between the firstcompartment 204 and the flow compartment 203 as the tip 224 is withdrawnfrom the second inlet 205. Thus, the default flow rate of the valve 210is the rate of coolant flow when the second inlet 205 is fully closed bythe tip 224.

In some embodiments, the bias spring 230 is positioned on a proximal endof the plunger 212 and has a constant stiffness to bias the plunger 212back into a position in which the tip 224 blocks the second inlet 205.In various embodiments, the SMA spring 240 is positioned on the plungerbetween the bias spring 230 and the tip 224. The SMA spring 240 can beattached to the tip 224 to variably withdraw the tip 224 from the secondinlet 205 in response to a rise in temperature of the coolant above athreshold temperature value (FIG. 2B). The SMA spring 240 can be made of(or comprised of) a shape memory alloy that expands or contracts basedon temperature such as one of nickel titanium (Ni—Ti), nickel titaniumiron (Ni—Ti—Fe), or nickel titanium copper (Ni—Ti—Cu), among otherpossibilities.

In various embodiments, the valve 210 further includes an orifice 217(labeled in FIG. 2B) of the first compartment 204 through which theplunger 212 is inserted. One or more extension walls 225 can surroundthe orifice and be attached (or formed) to an outside surface of thefirst compartment 204. The backstop 220 can be attached to the one ormore extension walls 225 and be in contact with a proximal end of thebias spring 230. In these embodiments, a distal end of the bias spring230 can be biased against the flange 216. Further, the SMA spring 240can be coupled between an inner wall of the first compartment 204 at theorifice 217 and the tip 224 of the plunger 212. The SMA spring 240 canbe made to compress against the inner wall in response to exposure tocoolant rising in temperature above the threshold temperature value,which causes the tip 224 to be variably withdrawn from the second inlet205. The valve 210 and the various compartments and components of thevalve 210 discussed herein can be manufactured of components that areresistant to corrosive environments and function with a variety ofdifferent coolants.

FIG. 2B is a side view of the example valve 210 of FIG. 2A while thecoolant temperature is above the threshold temperature value accordingto an embodiment. As the temperature of the coolant exceeds thethreshold temperature value (e.g., 30° C., 33° C., 36° C., or the like),the SMA spring 240 compresses, causing the tip 224 of the plunger 212 tobegin to withdraw from the second inlet 205. The increase in flow of thecoolant through the valve 210 is illustrated with double arrows. The SMAspring 240 can continue to compress proportionally (or according to afunction) in response to a continued increase in temperature of thecoolant until reaching a maximum contraction and thus also a maximumflow rate. The maximum flow rate can be between 14 and 18 GPM, forexample, or some other appropriately higher flow rate depending on thematerial of the SMA spring 240 and the temperature range of the coolant.

FIG. 3 is a graph 300 of an example transition zone 301 between a lowflow rate and a high flow rate of the valve 210 of FIGS. 2A-2B accordingto an embodiment. The graph 300 includes a valve opening plot 302 and avalve closing plot 304, illustrating that the trajectory of flow ratecan vary depending on whether the coolant is heating up or cooling. Asdiscussed, the default (low) flow rate of the valve can be between 3 and5 gallons per minute while a maximum flow rate of the valve can bebetween 14 and 18 gallons per minute. These flow rate ranges could beadjusted depending on the alloy type of the SMA spring 240 and/or thetype of coolant and expected temperature range of the coolant.

FIG. 4 is a schematic block diagram of a thermal model 400 for the valve210 of FIGS. 2A-2B according to some embodiments. The thermal model 400may assume a constant set point temperature (T_(s)). The thermal model400 can take into account a first temperature (T₁) coming into the valve210 from the first return line 105A, an average temperature (T_(av))within the valve 210, and a second temperature (T₂) of coolant leavingthe valve 210 and entering the second return line 105B. A resistance 440is illustrated to model the functioning of the SMA spring 240. Invarious embodiments,Q=m _(dot) ×C _(p)×(T ₂ −T ₁)=h×A×(T _(av) −T _(s))   (1)h=k×(R _(e))^(n)×(P _(r))^(m)∞(R _(e))^(m),hence h=K×(m _(dot))^(n)  (2)where K is a constant for a fluid type. Hence, from Equations (1) and(2), the following can be derived:

$\begin{matrix}{{T_{2} = {{T_{1} + {( m_{dot} )^{n - 1} \times}} \in {\times ( {T_{av} - T_{s}} )}}},{{{where} \in} = \frac{K.A}{C_{p}}}} & (3)\end{matrix}$As per the Dittus Boelter equation, n=0.8, hence n−1 is −0.2. Hence,

$\begin{matrix}{T_{2} = {T_{1} + \frac{\in {\times ( {T_{av} - T_{s}} )}}{( m_{dot} )^{0.2}}}} & (4)\end{matrix}$and because

${T_{av} = \frac{T_{1} + T_{2}}{2}},$Equation (4) has a non-linear iterative correlation. The valve operationrange should have a bandwidth to reduce temperature oscillation. Thus,in some embodiments, as m_(dot) increases, T₂ reduces, and the valve 210triggers at a lower m_(dot) and vice versa.

FIG. 5 is a cross-section view of an example dual-valve 510 thatcontrols coolant flow between a processing chamber and a coolant sourcewhile the coolant temperature is below a threshold temperature valueaccording to an embodiment. In the one embodiment, the dual-valve 510can be the same as the valve 110 of FIG. 1 . The dual-valve 510 can beunderstood as an extension of the valve 210 of FIGS. 2A-2B, and thusonly the modifications are explained here. For example, the firstcompartment 204 can be expanded to include the first inlet 203, a secondinlet 205A, and a third inlet 205B.

In the dual-valve 510 embodiments, instead of a single valve assembly,there are two valve assemblies, one each to selectively open up or closethe second inlet 205A and the third inlet 205B, respectively. Thus, afirst valve assembly can include a first plunger 212A, a first biasspring 230A, and a first SMA spring 240A. The first plunger 212A caninclude or be attached to a first flange 216A and a first tip 224A. Inthese embodiments, the first tip 224A is positioned at a distal end ofthe first plunger 212A and is to variably open and close the secondinlet 205A to vary a flow rate of the coolant from the default flowrate.

In some embodiments, the first bias spring 230A is positioned on aproximal end of the first plunger 212A and has a constant stiffness tobias the first plunger 212A back into a position in which the first tip224A blocks the second inlet 205A. In various embodiments, the first SMAspring 240A is positioned on the first plunger 212A between the firstbias spring 230A and the first tip 224A. The first SMA spring 240A canbe attached to the first tip 224A to variably withdraw the first tip224A from the second inlet 205A in response to a rise in temperature ofthe coolant above a first threshold temperature value (FIG. 2B).

In these embodiments, a second valve assembly can include a secondplunger 212B, a second bias spring 230B, and a second SMA spring 240B.The second plunger 212B can include or be attached to a second flange216B and a second tip 224B. In these embodiments, the second tip 224B ispositioned at a distal end of the second plunger 212B and is to variablyopen and close the third inlet 205B to vary a flow rate of the coolantfrom the default flow rate.

In some embodiments, the second bias spring 230B is positioned on aproximal end of the second plunger 212B and has a constant stiffness tobias the second plunger 212B back into a position in which the secondtip 224B blocks the third inlet 205B. In various embodiments, the secondSMB spring 240B is positioned on the second plunger 212B between thesecond bias spring 230B and the second tip 224B. The second SMA spring240B can be attached to the second tip 224B to variably withdraw thesecond tip 224B from the third inlet 205B in response to a rise intemperature of the coolant above a second threshold temperature value(FIG. 2B). The backstop 220 (FIGS. 2A-2B) can be modified to be largerand thus adapted to be attached to the one or more extension walls 225and be in contact with a proximal end of the first and second biassprings 230A and 203B.

In various embodiments, because the first SMA spring 240A can be made ofa different SMA material than that of the second SMA spring 240B, thefirst threshold temperature value can be different than the secondthreshold temperature value. For ease of explanation, assume the firstthreshold temperature value is lower than the second thresholdtemperature value. Thus, the first valve assembly can variably increasethe rate of flow through the dual-valve 510 using the first SMA spring240A up to approximately a medium flow rate, after which the secondvalve assembly can variably increase the rate of flow from approximatelythe medium flow rate to a highest flow rate using the second SMA spring240B. Thus, for example, at the highest flow rate, both of the first andsecond SMA springs 240A and 240B are fully compressed against the innerwall of the first compartment 204, as illustrated with reference to thesingle valve assembly in FIG. 2B. The step-wise and variable increase ofcoolant flow rate is illustrated pictorially in the graph of FIG. 6 .

Although FIG. 5 illustrates varying the flow rate with only two valveassemblies, additional valve assemblies can be added that include stillfurther different material of additional SMA spring(s), thus enabling aneven larger bandwidth of variable coolant flow rate in a multi-valveapparatus. In some embodiments, the flow rate ranges of each valveassembly in the multi-valve apparatus can overlap to some degree,creating even more possible flow rates via timing of flow rate increasesthrough actuation of the different SMA spring(s).

FIG. 6 is a graph 600 of an example first transition zone 601A between alow flow rate and a medium flow rate, and a second transition zone 601Bbetween the medium flow rate, and a high flow rate of the dual-valve 510of FIG. 5 . In some embodiments, as illustrated, the first transitionzone 601A and the second transition zone 602B overlap to some degree.This enables flow rates to gradually transition between opening/closingof valve assemblies based on different compression rates and thresholdtemperature values associated with different SMA springs.

With additional reference to FIG. 6 , the graph 600 includes a firstvalve opening plot 602A and a first valve closing plot 604A for thefirst valve assembly of the dual-valve 510, illustrating that thetrajectory of flow rate can vary depending on whether the coolant isheating up or cooling. The graph 600 further includes a second valveopening plot 602B and a second valve closing plot 604B for the secondvalve assembly of the dual-valve 510, illustrating that the trajectoryof flow rate can further vary depending on whether the coolant isheating up or cooling.

Illustrated in FIG. 6 , as the flow rate through the first valveassembly reaches “mid-flow” or a “medium flow” rate in the middle of theY-axis due to temperature increases across the X-axis of the graph 600,the flow rate through the second valve assembly gradually starts toincrease. White the flow rate through the first valve assembly remainshigh (and perhaps at its maximum), the flow rate through the secondvalve assembly can gradually increase until reaching a maximum flow ratefor the dual-valve 510. This additional increase provides still higherpossible flow rates, and thus larger overall flow rate range, of thecoolant through the dual-valve 510 compared with through the valve 210(FIGS. 2A-2B).

The preceding description sets forth numerous specific details such asexamples of specific systems, components, methods, and so forth, inorder to provide a good understanding of several embodiments of thepresent disclosure. It will be apparent to one skilled in the art,however, that at least some embodiments of the present disclosure may bepracticed without these specific details. In other instances, well-knowncomponents or methods are not described in detail or are presented insimple block diagram format in order to avoid unnecessarily obscuringthe present disclosure. Thus, the specific details set forth are merelyexemplary. Particular implementations may vary from these exemplarydetails and still be contemplated to be within the scope of the presentdisclosure.

Reference throughout this specification to “one embodiment” or “anembodiment” means that a particular feature, structure, orcharacteristic described in connection with the embodiment is includedin at least one embodiment. Thus, the appearances of the phrase “in oneembodiment” or “in an embodiment” in various places throughout thisspecification are not necessarily all referring to the same embodiment.In addition, the term “or” is intended to mean an inclusive “or” ratherthan an exclusive “or.” When the term “about” or “approximately” is usedherein, this is intended to mean that the nominal value presented isprecise within ±10%.

Although the operations of the methods herein are shown and described ina particular order, the order of the operations of each method may bealtered so that certain operations may be performed in an inverse orderor so that certain operation may be performed, at least in part,concurrently with other operations. In another embodiment, instructionsor sub-operations of distinct operations may be in an intermittentand/or alternating manner.

It is to be understood that the above description is intended to beillustrative, and not restrictive. Many other embodiments will beapparent to those of skill in the art upon reading and understanding theabove description. The scope of the disclosure should, therefore, bedetermined with reference to the appended claims, along with the fullscope of equivalents to which such claims are entitled.

What is claimed is:
 1. A cooling system comprising: a coolant source toprovide a coolant that cools down heated components of a processingchamber; and a return line for the coolant coupled between theprocessing chamber and the coolant source, the return line having avalve, which comprises: a flow compartment having a first inlet and anoutlet that support a default flow rate of the coolant, the flowcompartment also having a second inlet; a first compartment that isinline with the return line and that is to feed the coolant through thefirst inlet and the second inlet into the flow compartment; a plungerhaving a tip at a distal end of the plunger, the tip to variably openand close the second inlet to vary a flow rate of the coolant from thedefault flow rate; a bias spring positioned on a proximal end of theplunger; and a shape memory alloy (SMA) spring positioned on the plungerbetween the bias spring and the tip, the SMA spring attached to the tipto variably withdraw the tip from the second inlet in response to a risein temperature of the coolant above a threshold temperature value. 2.The cooling system of claim 1, wherein the valve further comprises: asecond compartment that comprises the outlet and is inline with thereturn line; and a partition that blocks flow between the firstcompartment and the second compartment.
 3. The cooling system of claim1, wherein the tip is cone-shaped.
 4. The cooling system of claim 1,wherein the valve further comprises: an orifice of the first compartmentthrough which the plunger is inserted; one or more extension wallssurrounding the orifice and attached to an outside surface of the firstcompartment; a backstop attached to the one or more extension walls andin contact with a proximal end of the bias spring; and the plungerhaving a flange against which a distal end of the bias spring is biased.5. The cooling system of claim 4, wherein the SMA spring is coupledbetween an inner wall of the first compartment at the orifice and thetip of the plunger, the SMA spring to compress against the inner wall inresponse to exposure to coolant rising in temperature above thethreshold temperature value.
 6. The cooling system of claim 1, whereinthe coolant is a fluid mixture comprising Ununtrium.
 7. The coolingsystem of claim 1, wherein the default flow rate of the valve comprisesbetween 3 and 5 gallons per minute and a maximum flow rate of the valvecomprises between 14 and 18 gallons per minute.
 8. A valve comprising: aflow compartment having a first inlet and an outlet that support adefault flow rate of a coolant from a return line between a processingchamber and a coolant source, the flow compartment also having a secondinlet; a first compartment that is inline with the return line and thatis to feed the coolant through the first inlet and the second inlet; aplunger having a tip at a distal end of the plunger, the tip to variablyopen and close the second inlet to vary a flow rate of the coolant fromthe default flow rate; a bias spring positioned on a proximal end of theplunger; and a shape memory alloy (SMA) spring positioned on the plungerbetween the bias spring and the tip, the SMA spring attached to the tipto variably withdraw the tip from the second inlet in response to a risein temperature of the coolant above a threshold temperature value. 9.The valve of claim 8, further comprising: a second compartment thatcomprises the outlet and is inline with the return line; and a partitionthat blocks flow between the first compartment and the secondcompartment.
 10. The valve of claim 8, wherein the tip of the plunger iscone-shaped.
 11. The valve of claim 8, further comprising: an orifice ofthe first compartment through which the plunger is inserted; one or moreextension walls surrounding the orifice and attached to an outsidesurface of the first compartment; a backstop attached to the one or moreextension walls and in contact with a proximal end of the bias spring;and the plunger having a flange against which a distal end of the biasspring is biased.
 12. The valve of claim 11, wherein the SMA spring iscoupled between an inner wall of the first compartment at the orificeand the tip of the plunger, the SMA spring to compress against the innerwall in response to exposure to coolant rising in temperature above thethreshold temperature value.
 13. The valve of claim 8, wherein thedefault flow rate of the valve comprises between 3 and 5 gallons perminute and a maximum flow rate of the valve comprises between 14 and 18gallons per minute.
 14. A valve comprising: a first inline compartmentto attach to a first return line exiting a processing chamber; a secondinline compartment to attach to a second return line entering a coolantsource; a flow compartment attached between the first inline compartmentand the second inline compartment and through which a coolant is toreturn to the coolant source; a first inlet orifice and a second inletorifice positioned between the first inline compartment and the flowcompartment; a plunger having a tip to variably open and close thesecond inlet orifice; and a shape memory alloy (SMA) spring positionedon the plunger and attached to the tip, the SMA spring to variablyincrease or decrease a flow rate of the coolant through the second inletorifice according to a temperature of the coolant.
 15. The valve ofclaim 14, wherein the plunger is to move orthogonally to a flow of thecoolant through the flow compartment.
 16. The valve of claim 14, furthercomprising: an orifice of the first inline compartment through which theplunger is inserted; one or more extension walls surrounding the orificeand attached to an outside surface of the first inline compartment; abias spring positioned on a proximal end of the plunger; a backstopattached to the one or more extension walls and in contact with aproximal end of the bias spring; and the plunger having a flange againstwhich a distal end of the bias spring is biased.
 17. The valve of claim14, wherein the tip is a cone-shaped tip and the SMA spring is adaptedto variably withdraw the cone-shaped tip from the second inlet orificein response to a rise in temperature of the coolant above a thresholdtemperature value.
 18. The valve of claim 17, wherein the SMA spring iscoupled between an inner wall of the first inline compartment and thecone-shaped tip, the SMA spring to compress against the inner wallproportionally in response to exposure to coolant rising in temperatureabove the threshold temperature value.
 19. The valve of claim 17,wherein a default flow rate of the valve, when the second inlet orificeis fully closed by the cone-shaped tip, comprises between 3 and 5gallons per minute and a maximum flow rate of the valve comprisesbetween 14 and 18 gallons per minute.
 20. The valve of claim 14, whereinthe SMA spring is comprised of one of nickel titanium (Ni—Ti), nickeltitanium iron (Ni—Ti—Fe), or nickel titanium copper (Ni—Ti—Cu).